ELECTROSTATIC CHUCK
AMAT DPS 200MM LAM ESC 300MM TEL ESC 300mm AMAT- 1-300mm ELECTROSTATIC CHUCK The electrostatic chuck (ESC) is used in a variety of semiconductor processes to hold the wafer during processing. ESCs employ a platen with integral electrodes which are biased with high voltage to establish an electrostatic holding force between the platen and wafer,…