AMAT DPS 200MM

AMAT DPS 200MM

LAM ESC 300MM

LAM ESC 300MM

TEL ESC 300mm

TEL ESC 300mm

AMAT- 1-300mm

AMAT- 1-300mm

ELECTROSTATIC CHUCK

The electrostatic chuck (ESC) is used in a variety of semiconductor processes to hold the wafer during processing. ESCs employ a platen with integral electrodes which are biased with high voltage to establish an electrostatic holding force between the platen and wafer, thereby “chucking” the wafer.