Process Inline Chemical Heater I

 

Applications In-line heating for the following processes:

 

  • SC2 processes using hydrochloric acid and hydrogen peroxide
     

  • Hydrofluoric acid
     
  • SC1 processes using ammonium hydroxide
     

  • Ultra-pure DI water
     

  • Virtually any aggressive chemistry

  • Etch processes using hot phosphoric acid
     

  • Quick Dump Rinse
     
  • Photoresist strip processes using sulfuric acid and hydrogen peroxide

 

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