Process Inline Chemical Heater I


Applications In-line heating for the following processes:


  • SC2 processes using hydrochloric acid and hydrogen peroxide

  • Hydrofluoric acid
  • SC1 processes using ammonium hydroxide

  • Ultra-pure DI water

  • Virtually any aggressive chemistry

  • Etch processes using hot phosphoric acid

  • Quick Dump Rinse
  • Photoresist strip processes using sulfuric acid and hydrogen peroxide


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